Direct and alignment-insensitive measurement of cantilever curvature
نویسندگان
چکیده
منابع مشابه
Direct measurement of cantilever spring constants and correction for cantilever irregularities using an instrumented indenter.
A method is presented that allows direct measurement of a wide range of spring constants of cantilevers using an indentation instrument with an integrated optical microscope. An uncertainty of less than 10% can be achieved for spring constants from 0.1 to 10(2) Nm. The technique makes it possible to measure the spring constant at any desired location on a cantilever of any shape, particularly a...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2013
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4813265